| Title | Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications |
|---|---|
| Author | Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata |
| Year | 2006 |
| Edition | |
| Volume | Volume 5 |
| Series | Advanced Micro and Nanosystems |
| Publisher | Wiley-VCH |
| City | |
| Language | English |
Size: 5.94MB | Pages: 517 |
LLC: N/A | DDC:
