| Title | Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines |
|---|---|
| Author | Alan H. Epstein (auth.), Jeffrey Lang (eds.) |
| Year | 2010 |
| Edition | 1 |
| Volume | |
| Series | MEMS Reference Shelf |
| Publisher | Springer US |
| City | |
| Language | English |
Size: 20.12MB | Pages: 456 |
LLC: N/A | DDC: 621.381
